Shared Research Facilities

Research Facilities

Revised 9/10/12

Cleanroom

All instruments in the cleanroom are located G75B Engineering Sciences Building (ESB).

• Suss Microtec MA6 Mask Aligner
• OAI UV Flood Exposure System
• (2) Laurell Technologies 400 Spinners
• JEOL JSM-7600F Scanning Electron Microscope (SEM)
• Temescal BJD 2000 E– beam Evaporator
• CVC 610 DC Magnetron Sputtering Station
• Oxford Plasmalab 80+ PECVD
• Trion Technology Minilock III Reaction Ion Etching (RIE) with ICP (Inductively Coupled Plasma)
• March PX– 250 Plasma Asher
• Annealsys AS– Micro (Rapid Thermal Processing)
• Thermolyne 6000 Programmable Furnace
• (2) Lindberg Blue M Furnaces
• Tencor Alpha–Step 200 Profilometer
• OLYMPUS BH–2 UMA Optical Microscope
• West Bond 7372E Epoxy Die Bonder
• West Bond 74776E Gold Wire Bonder

Electron Microscopy

• JEOL JEM–2100 Transmission Electron Microscope (TEM)—B63 ESB
• Sample Prep Equipment—B64 ESB
  • Allied High Tech Multiprep Precision Polishing System
  • Allied High Tech Low Speed Saw Tech 4
  • Meiji MT7000 Optical Microscope
  • Precision CNC Dicing/Cutting Saw SYJ-400
  • Tousimis Autosamdri–815 Critical Point Dryer—G75E2 ESB
• JEOL JSM–7600F Scanning Electron Microscope (SEM)— G75B ESB Cleanroom

Materials Fabrication and Characterization

• Nanoscope Multimode Atomic Force Microscope— White Hall B20B
• Asylum MFP-3D Atomic Force Microscope— White Hall B20B
• Olympus Spinning Disk Confocal Fluorescent Microscope— White Hall B20B
• Balzers Critical Point CO2 Dryer— White Hall B20
• Leitz Ergolux Optical Microscope— White Hall B20
• Bruker D8 Discovery XRD—211 Engineering Research Building
• Rigaku RU–300 XRD— 402A White Hall
• Physical Electronics PHI 5000 Versaprobe XPS/UPS— B62 ESB
• Renishaw Invia Raman Microscope— 325 Hodges Hall
• Digilab FTS 7000 System Fourier Transform Infra-Red (FTIR) Spectrometer—211 ERB
• J.A. Woollam M–2000U White Light Ellipsometer— 211 ERB
• Neocera Pioneer 180 Pulsed Laser Deposition System— White Hall Cleanroom 410 A
• CVP RF and DC Magnetron Sputtering Station— White Hall Cleanroom 410A

Bio-Nano Research Facility

• 4-Heracell 150i CO2 Incubators— G75E ESB (2), 381 Chemistry Research Labs (2)
• 2 Sorvall Legend X1R Centrifuges— G75E ESB, 381 Chemistry Research Labs
• 2 Sorvall Legend Micro 17R Microcentrifuges— G75E ESB, 381 Chemistry Research Labs
• Fisher Scientific Micromaster Inverted Microscope— G75E ESB
• Labsmith SVM340 Synchronized Video Microscope— G75E ESB
• EVOS FL Digital Inverted Fluorescent Microscope— G75E ESB
• Thermofisher Scientific Q Exactive Mass Spec— Chemistry Research Laboratory
• Steris Lab250Autoclave— ESB
• Spectrofluorometer— Chemistry Research Laboratory
• Wafer Dicer-will arrive in early fall
• Optical Profiler-will arrive in early fall
• Both locations have general lab refrigerators and freezers available

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